원자현미경의 이미지 구현 시 직각 경계 부위의 이미지 형상 왜곡 방지를 위한 실험적 연구

• 영문명: Experimental Research for Preventing Distortion of Materializing Right Angle Boundary of Atom Force Microscope Image
• 발행기관: 한국산업기술융합학회(구. 산업기술교육훈련학회)
• 저자명: 호춘기(Chun-Gi Ho)
• 간행물 정보: 『산업기술연구논문지』산업기술교육훈련논문지 제21권 4호, 203~209쪽, 전체 7쪽
• 주제분류: 공학 > 공학일반
• 파일형태: PDF
• 발행일자: 2016.12.30

영문 초록

Atom Force Microscope is a device that can measure few nanometers of resolution. AFM which is suitable for semiconductor requires the delicate operation to measure fine size and pattern form. These three Scan Rate, Set point, Z Servo gain is the important part. If the value is set up wrong, distorted image come out. These three parameters don t effect as a single value. It correlates and gives scanned image result. This study demonstrates after measuring three parameters separately and tracing one parameter s standard value with other two fixed suitable parameter. Distorted image through the measurement cannot be decided with the result. So it has to be measured with the standard parameters. This essay shows the best Scan rate, Set point, Z Servo gain parameter according to the cantilever specific condition and the roughness of a sample.

목차

Ⅰ. 서 론

Ⅱ. 이미지 구현 시 왜곡 현상

Ⅲ. 측정 방법 및 결과

Ⅳ. 결 론

키워드

AFM(원자현미경) SEM(주사전자현미경) STM(주사터널현미경) Nanometer(나노미터)