폴리실리콘 박막을 이용한 압력분포 시스템 분석

• 영문명: The Analysis of Pressure Distribution System using the Poly-Silicon Membrane
• 발행기관: 한국산업기술융합학회(구. 산업기술교육훈련학회)
• 저자명: 박용하(Yong Ha Park)
• 간행물 정보: 『산업기술연구논문지』산업기술교육훈련논문지 제15권 4호, 65~72쪽, 전체 8쪽
• 주제분류: 공학 > 공학일반
• 파일형태: PDF
• 발행일자: 2010.12.30

영문 초록

Piezo-resistive pressure sensors are consists of a module which is sensor part and hybrid circuit part using the piezo-resistive effect of single crystalline silicon. The circuit department comes to be divided on amplification circuit and temperature compensation circuit. The amplification circuit part needs to amplify signal to ECU (Electronic Control Unit) from micro-signal at sensor. The temperature compensation circuit from operational temperature scope follows at temperature for decreasing the output range. Namely, pressure sensor of single crystalline silicon materials because has the other side high temperature dependent characteristic where the sensitivity against a pressure is high certainly the temperature compensation circuit was under in necessity. Temperature compensation circuit the operational process is various and the variable must be considered complicated characteristic is following many in production. In order to improve like this problem point, with perception department about under using compensation circuit of separate way without today it researches the pressure distribution system which is under using in industrial site poly-silicon membrane on only amplification circuit.

목차

ABSTRACT

Ⅰ. 서론

Ⅱ. 설계 및 제작

Ⅲ. 실험조건 및 방법

Ⅳ. 결과 및 고찰

참고문헌

키워드

압력센서 압력분포 폴리실리콘 미세가공기술 Pressure Sensor Pressure Distribution Poly-Silicon MEMS