다결정 실리콘 카바이드의 열전 특성 및 응용에 관한 연구

• 영문명: A Study of Thermoelectric Characteristics of Poly-SiC and its Applications
• 발행기관: 한국산업기술융합학회(구. 산업기술교육훈련학회)
• 저자명: 이지공(JI Gong Lee)
• 간행물 정보: 『산업기술연구논문지』산업기술연구논문지 제23권 3호, 39~45쪽, 전체 7쪽
• 주제분류: 공학 > 공학일반
• 파일형태: PDF
• 발행일자: 2018.09.30

영문 초록

We have fabricated n-poly-SiC/p-poly-Si thermopiles on Si substrates and investigated their thermoelectric characteristics. Calorimetric gas flow sensors usingn-poly-SiC/p-poly-Si thermopiles were realized and characterized. The highest Seebeck coefficient of n-poly-SiC/p-poly-Si was 2180μV/K, obtained using a heater power of 148mW. The fabricated flow sensors exhibit operational capacity up to 1000sccm and sensitivity of -14.5μV/sccm for a heater current of 3mA in the 700sccm range. The response time of the sensors(40ms) was faster than the mass flow controller’s signal. The presented current-voltage characteristics of the thermopiles reveal good ohmic contact. Our results indicate that the proposed structure using SiC thermopiles is not only a good candidate for a new micro flow sensor, but also has potential for a variety of applications in the field of microelectromechanicalsystems(MEMS) sensors.

목차

ABSTRACT

Ⅰ. 서론

Ⅱ. 실험

Ⅲ. 실험결과 및 고찰

Ⅳ. 결론

참고문헌

키워드

실리콘카바이드 열전퇴 미소전자기계시스템 센서 유량센서 SiC Thermopile MEMS Sensor Flow Sensor