일렉트로마이그레이션이 이퓨즈에 미치는 영향과 개선에 관한 연구

• 영문명: A Study on Affects & Improvement in the eFUSE by the Electromigration
• 발행기관: 한국산업기술융합학회(구. 산업기술교육훈련학회)
• 저자명: 김명식(Myoung-Shik Kim)
• 간행물 정보: 『산업기술연구논문지』산업기술교육훈련논문지 제17권 1호, 75~81쪽, 전체 7쪽
• 주제분류: 공학 > 공학일반
• 파일형태: PDF
• 발행일자: 2012.03.30

영문 초록

In this study, Electromigration synopsis and developing, the electric heater which applies eFUSE system in case the breakdown will occur alternative solution experiment and Simulation leads from the present paper and under escape boil the Solution. Grasp analyzed Electromigration justice and a developing with precedence, analysis of eFUSE system composition element and function led and trouble analysis. Specially investigates Diode and MOSFETs quality and the function which are eFUSE system composition elements, data and in base with eFUSE system substitutions Diode (1N5814) which are damaged substitutes and the electric heater operates and condition before breakdown occurring and identically, namely very confirmation verified the fact that becomes the operation normally and predicted. Consequently, broken wire of eFUSE system damage and copper wiring, being an actual condition in compliance with Electromigration experiment leads and confirms, feed Diode and MOSFETs quality and function and principle of operation, that plan and management of manufacturing process there is a necessity which prudently will do, becomes.

목차

Ⅰ. 서 론

Ⅱ. 개선사례 및 실험방법

Ⅲ. 실험결과 및 고찰

Ⅳ. 결 론

키워드

Electromigration(전자이동) eFUSE(전자퓨즈) MOSFETs(모스펫) Pspice(시뮬레이션 툴)