공간적 확률 과정 기반의 수율 정보를 이용한 번인과 신뢰성 검사 정책

• 영문명: Differential Burn-in and Reliability Screening Policy Using Yield Information Based on Spatial Stochastic Processes
• 발행기관: 한국산업경영시스템학회
• 저자명: 황정윤(Jung Yoon Hwang) 심영학(Younghak Shim)
• 간행물 정보: 『산업경영시스템학회지』제35권 제4호, 1~9쪽, 전체 9쪽
• 주제분류: 경제경영 > 경영학
• 파일형태: PDF
• 발행일자: 2012.12.31

영문 초록

Decisions on reliability screening rules and burn-in policies are determined based on the estimated reliability. The variability in a semiconductor manufacturing process does not only causes quality problems but it also makes reliability estimation more complicated. This study investigates the nonuniformity characteristics of integrated circuit reliability according to defect density distribution within a wafer and between wafers then develops optimal burn-in policy based on the estimated reliability. New reliability estimation model based on yield information is developed using a spatial stochastic process. Spatial defect density variation is reflected in the reliability estimation, and the defect densities of each die location are considered as input variables of the burn-in optimization. Reliability screening and optimal burn-in policy subject to the burn-in cost minimization is examined, and numerical experiments are conducted.

목차

1. 서론

2. Spatial NHPP에 의한 수율 모형

3. 신뢰성 모형

4. 차등적 번인 정책

5. 결론 및 추후 연구

References

키워드

Spatial Stochastic Process Differential Burn-in Yield