반도체 설비의 효율성 제고를 위한 설비 할당 스케줄링 규칙에 관한 연구

• 영문명: A Study on Deterministic Utilization of Facilities for Allocation in the Semiconductor Manufacturing
• 발행기관: 한국산업경영시스템학회
• 저자명: 김정우(Jeong Woo Kim)
• 간행물 정보: 『산업경영시스템학회지』제39권 제1호, 153~161쪽, 전체 9쪽
• 주제분류: 경제경영 > 경영학
• 파일형태: PDF
• 발행일자: 2016.03.30

영문 초록

Semiconductor manufacturing has suffered from the complex process behavior of the technology oriented control in the production line. While the technological processes are in charge of the quality and the yield of the product, the operational management is also critical for the productivity of the manufacturing line. The fabrication line in the semiconductor manufacturing is considered as the most complex part because of various kinds of the equipment, re-entrant process routing and various product devices. The efficiency and the productivity of the fabrication line may give a significant impact on the subsequent processes such as the probe line, the assembly line and final test line. In the management of the re-entrant process such as semiconductor fabrication, it is important to keep balanced fabrication line. The Performance measures in the fabrication line are throughput, cycle time, inventory, shortage, etc. In the fabrication, throughput and cycle time are the conflicting performance measures. It is very difficult to achieve two conflicting goal simultaneously in the manufacturing line. The capacity of equipment is important factor in the production planning and scheduling. The production planning consideration of capacity can make the scheduling more realistic. In this paper, an input and scheduling rule are to achieve the balanced operation in semiconductor fabrication line through equipment capacity and workload are proposed and evaluated. New backward projection and scheduling rule consideration of facility capacity are suggested. Scheduling wafers on the appropriate facilities are controlled by available capacity, which are determined by the workload in terms of the meet the production target.

목차

Abstract

1. 서론

2. 기존 연구현황

3. 설비 할당을 위한 모형 개발

4. 실험환경 및 결과

5. 결론

References

키워드

Semiconductor Fabrication Scheduling Equipment Capacity Workload