300㎜ 웨이퍼 팹의 포토 bay에서 side-track buffer와 직접반송 운영 Logic에 관한 연구

• 영문명: Study for side-track buffer and direct delivery photolithography bay of 300㎜ wafer FAB
• 발행기관: 한국산업경영시스템학회
• 저자명: 최성우 이규배
• 간행물 정보: 『한국산업경영시스템학회 학술대회』2011년 추계학술대회 논문집, 12~12쪽, 전체 1쪽
• 주제분류: 공학 > 산업공학
• 파일형태: PDF
• 발행일자: 2011.10.27

영문 초록

This study treats the operation logics for direct delivery and side-track buffer(STB) of AMHS(automated material handling system) in an intra-bay of 300㎜ wafer fab. An intra-bay of 300㎜ wafer fab has multiple side-track buffers and a stocker. Side-track buffer and stocker are temporary storage space in 300㎜ fab. That is, before a wafer lot is loaded into a load port of equipment by OHT(over-head transporter), wafer lot waits a stocker or a side-track buffer corresponding to the intra-bay of equipment. In a real 300㎜ fab, equipment utilization and on time completion time of a operation are key parameter indexes. However. so long transportation time is one among main reasons increasing the idle time of an equipment and operation tardiness of a wafer lot. Therefore, in this paper, we focus on the operating logics for the side-track buffer and delivery strategies of wafer lots to STB. equipment and Stocker. Results of computational simulation tests on randomly generated test problems show the effectiveness of the above operation logics and delivery strategies.

목차

Abstract

키워드

AMHS stocker OHT side-track buffer direct delivery