Metallization of Polymers Modified by Ton-Assisted Reaction (IAR)

• 영문명: Metallization of Polymers Modified by Ton-Assisted Reaction (IAR)
• 발행기관: 한국마이크로전자및패키징학회
• 간행물 정보: 『마이크로전자 및 패키징학회지』제8권 제1호, 53~59쪽, 전체 7쪽
• 주제분류: 공학 > 산업공학
• 파일형태: PDF
• 발행일자: 2001.03.31

영문 초록

Surfaces of PTFE and PVDF were modified by ion-assisted reaction (IAR) in which 1 keV Ar⁺ ions were irradiated on the surface of the polymer with varying ion dose in an oxygen gas environment, and Cu, Pt, Al and Ag thin films were deposited on the modified polymers. Wettability of the modified polymers was largely improved by the formation of hydrophilic groups due to chemical reaction between polymer surface and the oxygen gas during IAR. The change in wettability in the modified polymers was also related to the change in surface morphology and roughness. Adhesion between metal films and polymers modified by IAR was significantly improved, so that no detachment was possible in the Scotch TM tape test. The increase of adhesion strength between the metal film and the modified PVDF was mainly attributed to the formation of hydrophilic groups, which interacted with the metal film. In the case of the modified PTFE, the enhanced adhesion to metal film could be explained by the change in surface morphology together with the formation of hydrophilic groups. The electrical properties of the metal films on the modified polymers were also investigated.

목차

1. Introduction

2. Experimental

3. Results and Discussion

4. Conclusions

References

키워드

ton-assisted reaction PTEE PVDF hydrophilic group adhesion wettability