2단 튜브형 가열로 반응기에 의한 초미세 SiO₂입자의 제조 및 증착 연구

• 영문명: A Study on Ultrafine SiO₂Particles Generation and Deposition by 2-Stage Tube Furnace Reactor
• 발행기관: 강원대학교 산업기술연구소
• 저자명: 유수종(You Soo Jong) 김교선(Kim Kyo Seon)
• 간행물 정보: 『산업기술연구』vol.17, 233~239쪽, 전체 7쪽
• 주제분류: 공학 > 공학일반
• 파일형태: PDF
• 발행일자: 1997.09.30

영문 초록

The effects of preheating the gas stream on deposition characteristics of ultrafine SiO₂particles were investigated theoretically. The model equation such as mass and energy balance equations and aerosol dynamic equations were solved to predict the particle growth and deposition. The gas temperatures, SiCl₄concentrations, SiO₂particle volumes, SiO₂particle sizes and deposition efficiencies of SiO₂ particles were calculated for various preheating temperatures. As the preheater setting temperature increases, the SiO₂ particle size distribution becomes more uniform, because the effect of SiO₄ diffusion decreases.

목차

ABSTRACT

1. 서론

2. 이론

3. 수치 모사 결과 및 고찰

4. 결론

5. 참고문헌