마이크로 펌프의 PZT 엑튜레이터 거동 해석

• 영문명: The behavior analysis o i PZ1 actuators lo r m icropum p
• 발행기관: 호서대학교 공업기술연구소
• 저자명: 한지원(Ji-W on Han)
• 간행물 정보: 『공업기술연구 논문집』제26권 제1호, 147~151쪽, 전체 5쪽
• 주제분류: 공학 > 공학일반
• 파일형태: PDF
• 발행일자: 2007.06.30

영문 초록

Recently, there has been an increased interest in microfludic system employing MEMS technologies. The core component of this system is a piezoelectric valvless micropump that can convert the reciprocating movement of a membrane activated by a PZT actuator. Modeling of the PZT actuator was performed using CoventorWare. to analyze a behavior membrane, several important parameters were included. Membrane centeral displacement is increased with increasing PZT area ratio, but is decreased with increasing PZT thickness ratio. we found that the membrane displacement decreases when increasing the bonding layer thickness and increasing the PZT/membrane thickness ratio.

목차

1.서론

II. 수치해석

m . 결 론

키워드

MEMS Micropump PZT actuator Displacement Membrane