장비 구동부품 기인 Particle 평가를 위한 마모측정기의 개발에 관한 연구

• 영문명: A Study of Developing Wear Tester to Measure and Minimize Particle Levels in Cleanroom
• 발행기관: 한국산업경영시스템학회
• 저자명: 장성호(Sung HoChang) 윤상한(Sang Han Yoon) 노권학(Kwonhak Noh) 이종환(Jonghwan Lee)
• 간행물 정보: 『한국산업경영시스템학회 학술대회』2012년 추계학술대회 논문집, 75~80쪽, 전체 6쪽
• 주제분류: 공학 > 산업공학
• 파일형태: PDF
• 발행일자: 2012.10.30

영문 초록

Cleanroom could be largely classified into industrial cleanroom that can be contaminated by particlesand bio-cleanroom that can be contaminated by biological particles. Electrical manufacturing companies such as precision machines and electrical parts essentially have industrial cleanroom facilities and clean technologies to produce defects free products due to particles.Industrial cleanroom should be controlled in respect of 4M1E to prevent from foreign materials of submicro unit and to keep out contamination sources from outside. In this paper, a concept for a quantitative methodology to measure the particles from running components was suggested by combining both newly making clean booth such as wear tester and laser particle counter.

목차

1. 서론

2. 상용중인 마모 시험기 및 파티클 측정기

3. 개념적인 파티클 측정기 개발

4. 결론 및 추가연구

참고문헌

키워드

Particle Counter Clean Room