차세대 반도체 공정에서의 No-wait 제약조건 클러스터 툴 스케줄링 알고리즘 개발

• 영문명: A Development of Cluster Tool Scheduling Algorithm Subject to No-wait Constraints in Next Generation Fab
• 발행기관: 한국산업경영시스템학회
• 저자명: 이현(Hyun Lee) 허선(Sun Hur) 박유진(Eugene Park)
• 간행물 정보: 『한국산업경영시스템학회 학술대회』2010년 추계학술대회 논문집, 1~8쪽, 전체 8쪽
• 주제분류: 공학 > 산업공학
• 파일형태: PDF
• 발행일자: 2010.11.30

영문 초록

In 450mm wafers production environment for next generation Fab, one of the most significant features is the adoption of full automation to the whole manufacturing processes involved. The full automation system will prevent the workers from intervening the manufacturing processes as much as possible and increase the importance of each individual wafer noticeably, and thus require a more robust scheduling system for entire semiconductor manufacturing processes. The scheduling system for 450mm wafers production also should be capable of monitoring the status of each individual wafer and collecting useful Fab data in real time. In this study, we first analysis of cluster tool in 450mm wafers production environment, and then propose a real-time scheduling algorithm based on timetabling algorithm.

목차

1. 서 론

2. 클러스터 툴과 관련연구

3. No-wait Timetabling 알고리즘

4. 클러스터 툴 No-wait Timetabling 알고리즘

5. 결 론

키워드

Semiconductor 450mm Wafer Production Real-time Scheduling Job Shop No-wait