450mm 웨이퍼 생산시스템에서의 실시간 스케줄링 구축방법

• 영문명: Development of Real-Time Scheduling Methods in 450mm Wafer Production System
• 발행기관: 한국산업경영시스템학회
• 저자명: 이현(Hyun Lee) 허선(Sun Hur) 박유진(Eugene Park) 이건우(Gunwoo Lee)
• 간행물 정보: 『한국산업경영시스템학회 학술대회』2010년 춘계학술대회 논문집, 1~7쪽, 전체 7쪽
• 주제분류: 공학 > 산업공학
• 파일형태: PDF
• 발행일자: 2010.04.30

영문 초록

In 450mm wafers production environment for next-generation semiconductor production, one of the most significant features is the adoption of full automation to the whole manufacturing processes involved. The full automation system applied to the whole manufacturing processes will prevent the workers from intervening the manufacturing processes as much as possible and increase the importance of each individual wafer noticeably, and thus require a more robust scheduling system for entire semiconductor manufacturing processes. The scheduling system for 450mm wafers production also should be capable of monitoring the status of each individual wafer and collecting useful fab data in real time. Based on data (or information) gathered in each process, the real-time scheduling system function efficiently to control the whole semiconductor manufacturing processes. In this study, we first carry out preliminary survey on the system requirements and the necessary functions for constructing the real time scheduling system with considering the changes from 300mm wafer production environment to 450mm wafer production environment, and then propose the scheduler system architectures for the cluster-type production processes which are the general in 450mm wafer production environment for the efficient production scheduling. The system architectures proposed in this study involve the modules for real-time scheduling, the modules for supporting the cluster-type production, the modules for finding optimal schedules, and so on. Also, we provide the specifications of the key required functions and capabilities of the modules and the relationship among the modules proposed.

목차

1. 서 론

2. 클러스터 장비에 대한 스케줄링 기법에 대한 연구

3. 차세대 스케줄링 시스템 요구사항

4. 클러스터형 스케줄러 시스템

5. 결 론

키워드

Semiconductor 450mm Wafer Production Real-time Scheduling Manufacturing Execution System