학술논문
Properties of Interlayer Low Dielectric Polyimide during Aluminum Etching with Electron Cyclotron Resonance Etcher System
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- 영문명
- Texture of Al/Ti thin films deposited on low dielectric polymer substrates
- 발행기관
- 한국마이크로전자및패키징학회
- 저자명
- 간행물 정보
- 『한국마이크로전자및패키징학회 학술대회자료집』2000년도 Proceedings of 5th International Joint Symposium on Microeletronics and Packaging, 103~108쪽, 전체 6쪽
- 주제분류
- 공학 > 산업공학
- 파일형태
- 발행일자
- 2000.04.30
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