레이저 간섭계를 이용한 측정발의 길이에 따른 정반의 평면도에 관한 연구

• 영문명: A Study of Flatness of Surface Plate Under Measurement Foot Distance Using Laser Interferometer
• 발행기관: 한국산업기술융합학회(구. 산업기술교육훈련학회)
• 저자명: 김황열(Hwang-Yeol Kim)
• 간행물 정보: 『산업기술연구논문지』산업기술교육훈련논문지 제22권 2호, 93~100쪽, 전체 8쪽
• 주제분류: 공학 > 공학일반
• 파일형태: PDF
• 발행일자: 2017.06.30

영문 초록

A las er inte rferometer is a system to measure very accur ate motion by using optical interference, and it i s used not only f or meas urement of er ror of length measurement of standard, machine tool, and measuring equipm ent but also for extraction o f location by being in cluded in a precision tool as a sta ndard. A flatne ss indi cates the size of difference from the set s tandard flat surface on the measured, and the st andard flat surface indica tes the geomet rical flat surface including p oints far from the measured flat surface. In thi s study, the length of mea surement foot using a laser interferometer was measured to determine the difference of f latness under the numb er of me asuring points.

목차

Ⅰ. 서 론

Ⅱ. 실험장치 및 방법

Ⅲ. 실험결과 및 고찰

Ⅳ. 결 론

키워드

Flatness(평면도) Optical Flat(옵티컬 플랫) Surface Plate(정반) Closure Error(폐쇄오차) Detector(검출기)