장비 구동부품 기인 Particle 평가를 위한 마모측정기의 개발에 관한 연구

• 영문명: A Study of Developing Wear Tester to Measure and Minimize Particle Levels in Cleanroom
• 발행기관: 한국산업경영시스템학회
• 저자명: 박광희(Kwang Hee Park) 노권학(Kwonhak Noh) 장성호(Sung Ho Chang) 이종환(Jonghwan Lee) 차영철(Young Cheul Cha) 전해동(Hae Dong Chun)
• 간행물 정보: 『산업경영시스템학회지』제36권 제2호, 1~7쪽, 전체 7쪽
• 주제분류: 경제경영 > 경영학
• 파일형태: PDF
• 발행일자: 2013.06.30

영문 초록

Cleanroom could be largely classified into industrial cleanroom that can be contaminated by particles and bio-cleanroom that can be contaminated by biological particles. Electrical manufacturing companies producing precision machines and electrical parts essentially have industrial cleanroom facilities and clean technologies to produce defects free products due to particles. Industrial cleanroom should be controlled in respect of 4M1E to prevent from foreign materials of sub-micro unit and to keep out contamination sources from outside. In this paper, a concept for a quantitative methodology to measure the particles from running components was suggested by combining both newly making clean booth such as wear tester and laser particle counter.

목차

1. 서론

2. 상용중인 마모 시험기 및 파티클 측정기

3. 개념적인 파티클 측정기 개발

4. 타이밍벨트 마모 파티클 측정결과 및 실증연구

4. 결론 및 추가연구

References

키워드

Particle Counter Clean Room