알루미나의 펨토초 레이저 가공특성 연구

• 영문명: Femtosecond laser micromaching in Alumina ceramic
• 발행기관: 한국레이저가공학회
• 저자명: 이상만(Sang-Man Lee) 우정식(Jung-Sik Woo) 이만섭(Man-Seop Lee)
• 간행물 정보: 『한국레이저가공학회 학술대회 논문집』2008년도 추계학술발표대회 논문집, 121~124쪽, 전체 4쪽
• 주제분류: 공학 > 기계공학
• 파일형태: PDF
• 발행일자: 2008.11.30

영문 초록

Alumina ceramic has beem micro-structured in air using a chirped-pulse-amplification Ti:sapphire laser. High quality of micro-machining of alumina with almost no melting layer and fine depostion layer of debrisis obtained. So we can fabricate micro-cuts which has small rougthness section with angle of 45~76˚ on groove wall. It was found that initial crystalline phase(α-Al₂O₃) is unaltered of subtrate and the debris produced consists of single crystal nanoparticle of α-Al₂O₃with diameters from 20nm to 10㎛.

키워드

Femtosecond pulse laser micromachining Alumina(Al₂O₃)