잔류카본 제거공정에 대한 CFD 해석

• 영문명: CFD Analysis of the removal process of residual carbon
• 발행기관: 한국환경에너지공학회
• 저자명: 송민정(Min-jeong Song) 오세천(Sea-cheon Oh)
• 간행물 정보: 『환경에너지공학』제16권 제2호, 44~51쪽, 전체 8쪽
• 주제분류: 공학 > 환경공학
• 파일형태: PDF
• 발행일자: 2021.12.31

영문 초록

Recently, the need of renewable energy is significantly increasing by carbon neutral, the demand of silicon wafers is also increasing as a result of growth of the solar energy industry. However, the recycling technology of silicon sludge is needed because a large amount of waste silicon sludge is generated from the silicon wafer manufacturing process. Many researches have been studied to convert the silicon component contained in the silicon sludge to silicon carbide (SiC). SiC powder can be synthesized using silicon sludge by heat treatment with carbon addition. Therefore, the removal process of residual carbon is required because the excess carbon is generally used to maximize the SiC conversion rate. In this work, computational fluid dynamic (CFD) analysis of the removal process of residual carbon has been studied by using the commercial CFD code ANSYS FLUENT.

목차

1. 서 론

2. CFD 해석 모델

3. 결과 및 고찰

4. 결 론

키워드

Silicon sludge Silicon carbide CFD Residual carbon removal