사차원 주사투과전자현미경 기법을 이용한 소재 분석 연구 동향

• 영문명: 4D-STEM analysis of materials: Progress and Future
• 발행기관: 한국세라믹학회
• 저자명: 손운배(Woonbae Sohn)
• 간행물 정보: 『세라미스트』제27권 제2호, 243~254쪽, 전체 12쪽
• 주제분류: 공학 > 화학공학
• 파일형태: PDF
• 발행일자: 2024.06.30

국문 초록

4D-STEM (four dimensional scanning transmission electron microscopy) is a powerful technique for analysis from which structural, physical, chemical information can be extracted. When it comes to 4D-STEM experiment, a converged electron beam is scanned across the 2D area of sample, and a pixelated detector records a 2D diffraction pattern at each scan position. Thus, the final datasets have four dimensions. This paper will cover material information that can be obtained through 4D STEM and summarize the current status and use of 4D-STEM studies including virtual imaging, phase retrieval (ptychography) and structural analysis of amorphous materials. The future perspective of 4D-STEM for new findings is also discussed.

목차

1. 서론

2. 본론

3. 결론

REFERENCES

키워드

4D-STEM Pixelated detector Structural analysis Virtual imaging