공정 변수 변화에 따른 실란 플라즈마내 음이온 특성

• 영문명: The Characteristics of Negative lons in Silane Plasma Changing the Process Variables
• 발행기관: 강원대학교 산업기술연구소
• 저자명: 김동주(Dong Joo Kim) 김교선(Kyo Seon Kim)
• 간행물 정보: 『산업기술연구』vol.15, 15~22쪽, 전체 8쪽
• 주제분류: 공학 > 공학일반
• 파일형태: PDF
• 발행일자: 1995.09.30

영문 초록

We have studied the generation and behavior of negative ions in silane plasmas. The negative ions were formed by homogeneous reaction in silane plasma and the behavior of negative ions were predicted by solving the model equations. The concentration profiles of negative ions were shown as a function of reactor length and time. The effects of process variables such as reactor pressure, flow rate and electrical field strengths on the behavior of negative ions were analyzed.

목차

ABSTRACT

1. 서론

2. 이론

3. 결과 및 고찰

4. 결론

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