Large-area photosensitive glass slant processing using UV Laser

• 발행기관: 한국산업경영시스템학회
• 저자명: Yong Dae Kim(김용대) Byung Chan Min(민병찬) Jae hoon Lee(이제훈) Dong Sig Shin(신동식)
• 간행물 정보: 『한국산업경영시스템학회 학술대회』2017년 추계학술대회 논문집, 144~151쪽, 전체 8쪽
• 주제분류: 공학 > 산업공학
• 파일형태: PDF
• 발행일자: 2017.10.30

영문 초록

When taking X-ray, Some of them are not only absorbed as they pass through the body, but some are scattered and blurred. To prevent this problem, X-Ray Grid was placed between the body and the film. Conventionally, in order to manufacture an X-ray grid, a lead sheet and an aluminum sheet were adhered with epoxy or the like, cut to a predetermined thickness, and formed in a line at a predetermined angle. New grids are actively being developed to solve this problem. In this study, Laser beam was irradiated on a photosensitive glass having high X-ray transmittance to form an oblique lattice type channel. When the photosensitive glass is exposed to Laser beam, Previous studies have shown that laser exposure to photosensitive glass reacts with UV-Laser to form high-precision microstructures. The photosensitive glass exposed by the laser is heat-treated at a high temperature to crystallize the exposed part. When the crystallized patterns are etched with a hydrofluoric acid liquid solution, a structure having a depth is completed. The completed structure is filled with metals with X-ray shielding properties. The angle of incidence can be processed up to 18, which is the angle of incidence of ordinary X-ray, The upper surface line width of the etched pattern is 20um or less and The depth of processing after etching was found to be more than 100um, which means the filler can be deposited sufficiently

목차

1. Introduction

2. Method

3. Result

4. Discussion

키워드

X-ray Grid Micromachining UV Laser Photosensitive glass