효율적 임계치 결정 방법을 이용한 영상결함 자동검출기의 구현

• 영문명: The Implementation of Automatic Image Defect Detector using Efficient Threshold Selection Method
• 발행기관: 한국컴퓨터게임학회
• 저자명: 김상훈(Sang Hoon Kim) 박명숙(Myeong Suk Pak)
• 간행물 정보: 『한국컴퓨터게임학회논문지』제28권 1호, 111~116쪽, 전체 6쪽
• 주제분류: 공학 > 컴퓨터학
• 파일형태: PDF
• 발행일자: 2015.03.30

영문 초록

A image defect detecting vision system for the automatic optical inspection of wafer has been developed. For the successful detection of various kinds of defects, the performance of two threshold selection methods are compared and the improved Otsu method is adopted so that it can handle both unimodal and bimodal distributions of the histogram equally well. An automatic defect detection software for practical use was developed with the function of detection of ROI, fast thresholding and area segmentation. Finally each defect pattern in the wafer is classified and grouped into one of user-defined defect categories and more than 14 test wafer samples are tested for the evaluation of detection and classification accuracy in the inspection system.

목차

1. 서론

2. 웨이퍼 영상 결함 검출 시스템

3. 실험

4. 결 론

감사의 글

참고문헌

키워드

defect detection threshold selection Otsu thresholding unimodal distribution