화합물 반도체 공장의 통합생산시스템 설계에 관한 연구

• 영문명: A Design of Integrated Manufacturing System for Compound Semiconductor Fabrication
• 발행기관: 한국산업경영시스템학회
• 저자명: 이승우(Seung-Woo Lee) 박지훈(Ji-Hoon Park) 이화기(Hwa-Ki Lee)
• 간행물 정보: 『산업경영시스템학회지』제26권 제3호, 67~73쪽, 전체 7쪽
• 주제분류: 공학 > 산업공학
• 파일형태: PDF
• 발행일자: 2003.09.01

영문 초록

Manufacturing technologies of compound semiconductor are similar to the process of memory device, but management technology of manufacturing process for compound semiconductor is not enough developed. Semiconductor manufacturing environment also has been emerged as mass customization and open foundry service so integrated manufacturing system is needed. In this study we design the integrated manufacturing system for compound semiconductor fabrication t hat has monitoring of process, reduction of lead-time, obedience of due-dates and so on. This study presents integrated manufacturing system having database system that based on web and data acquisition system. And we will implement them in the actual compound semiconductor fabrication.

목차

1. 서 론

2. 화합물반도체의 제조공정과 Open Foundry Service

3. 통합생산시스템의 설계 및 구축

4. 결론 및 향후연구

참고문헌