증착 구간에서의 온도 제어에 따른 SiO₂초미립자의 증착 특성 고찰

• 영문명: A Study on the Deposition Characteristics of Ultrafine SiO₂ Particles by Temperature Control in Deposition Zone
• 발행기관: 강원대학교 산업기술연구소
• 저자명: 유수종(Soo Jong You) 김교선(Kyo Seon Kim)
• 간행물 정보: 『산업기술연구』vol.16, 157~168쪽, 전체 12쪽
• 주제분류: 공학 > 공학일반
• 파일형태: PDF
• 발행일자: 1996.09.30

영문 초록

The deposition characteristics of ultrafine SiO₂ particles were investigated in a tube furnace reactor theoretically and experimentally controlling tube wall temperature in deposition zone. The model equations such as mass and energy balance equations and aerosol dynamic equations inside reactor and deposition tube were solved to predict the particle growth and deposition. The particle size and deposition efficiencies of SiO₂ particles were calculated, changing the process conditions such as tube furnace setting temperature, total gas flow rate inlet SiCl₄ concentration and were compared with the experimental results.

목차

ABSTRACT

1. 서론

2. 이론

3. 실험 방법

4. 결과 및 고찰

5. 결론

참고문헌