CO₂ 레이저 빔에 의한 Si₃N₄ 세라믹의 반응연구

• 영문명: Surface transform of Si₃N₄ ceramics irradiated by CO₂ laser beam
• 발행기관: 한국레이저가공학회
• 저자명: 김선원 이제훈 서정 조해용 김관우
• 간행물 정보: 『한국레이저가공학회 학술대회 논문집』2006년도 춘계학술발표대회 논문집, 16~24쪽, 전체 9쪽
• 주제분류: 공학 > 기계공학
• 파일형태: PDF
• 발행일자: 2006.06.01

영문 초록

  Silicon Nitride (Si₃N₄), which is widely used in a variety of applications, is hard-to-machine due to its high hardness. At high temperature (e.g. above 1000℃), however, the machinability can be greatly improved. In this work, we used a CO₂ laser with a high absorptivity to Si₃N₄ of 0.9 to locally heat the surface of a rotating Si₃N₄ rod on a lathe. In order to examine the effects of the laser-assisted heating on hardness, an Si₃N₄ rod is heated to temperatures from 900 to 1800℃ and is rotated at speeds from 440-900 rpm in experiments. When the rod is naturally cooled to room temperature, we measured the Vickers hardness (Hv); and observed the surface of HAZ using a scanning electron microscopy (SEM). Energy dispersive spectroscopy(EDS) was used for ingredient analysis. Results showed that when heated at 1600℃, the hardness of Si₃N₄ decreased from 1500 Hv to 1000 Hv. Also, in order to predict the depth of HAZ, we numerically analyzed the laser-assisted heating of Si₃N₄.

목차

ABSTRACT
1. 서론
2. 실험방법
3. 결과 및 고찰
4. 결론
후기
5. 참고문헌

키워드

Ceramics(세라믹스) CO₂ laser(이산화탄소 레이저) EDS(에너지 분산형 X-ray 분광기) HAZ(열영향부) Pyrometer(고온계) Silicon nitride(질화규소)