The need for education to solve ethical problems that may arise due to AI has been recognized. In this study, we set out to develop an AI ethics awareness scale that can assess the level of AI ethics awareness of elementary school students. AI ethical awareness was defined as a concept consisting of three components: AI ethical sensitivity, judgment, and motivation by referring to Rest's four components. Furthermore the Ministry of Science and ICT proposed 10 requirements. These 10 requirements are as follows. Human rights protection, Privacy protection, Respect for diversity, Prohibition of human rights violation, Publicity, Solidarity, Data management, Accountability, Safety, and Transparency. In order to measure these requirements, a scale was created by using these requirements as measurement factors. This was done by showing elementary school students AI ethics problem scenarios through webtoons and having them respond to related questions. In order to verify the validity of the contents for the developed preliminary questions, a Delphi survey was conducted twice. The 1st and 2nd tests were conducted on 5th and 6th grade elementary school students. Factor analysis was also conducted on the test results to verify validity. Finally, 30 items were selected through reliability verification. The scale developed in this study serves as objective data to diagnose the level of AI ethics awareness, and is expected to contribute to more systematic education for the cultivation of AI ethics awareness in the field of elementary education in the future.