복수 타입의 웨이퍼 혼류생산을 위한 클러스터 장비 로봇 운영 최적화

• 영문명: Optimization for robot operations in cluster tools for concurrent manufacturing of multiple wafer types
• 발행기관: 강원대학교 산업기술연구소
• 저자명: 유태선(Tae-Sun Yu) 이준호(Jun-Ho Le) 고성길(Sung-Gil Ko)
• 간행물 정보: 『산업기술연구』vol.43, 49~55쪽, 전체 7쪽
• 주제분류: 공학 > 공학일반
• 파일형태: PDF
• 발행일자: 2023.12.31

영문 초록

Cluster tools are extensively employed in various wafer fabrication processes within the semiconductor manufacturing industry, including photo lithography, etching, and chemical vapor deposition. Contemporary fabrication facilities encounter customer orders with technical specifications that are similar yet slightly varied. Consequently, modern fabrications concurrently manufacture two or three different wafer types using a cluster tool to maximize chamber utilization and streamline the flow of wafer lots between different process stages. In this review, we introduce two methods of concurrent processing of multiple wafer types: 1) concurrent processing of multiple wafer types with different job flows, 2) concurrent processing of multiple wafer types with identical job flows. We describe relevant research trends and achievements and discuss future research directions.

목차

1. 서 론

2. 본 론

3. 결 론

후 기

References

키워드

Semiconductor manufacturing Cluster tools Concurrent processing Wafer fabrication process