마이크로 트랜스듀서를 위한 압전 박막 소재 기술 동향

• 영문명: Piezoelectric Thin Films for Microtransducer
• 발행기관: 한국세라믹학회
• 저자명: 정수영(Soo Young Jung) 백승협(Seung-Hyub Baek)
• 간행물 정보: 『세라미스트』제22권 제1호, 82~95쪽, 전체 14쪽
• 주제분류: 공학 > 화학공학
• 파일형태: PDF
• 발행일자: 2019.03.30

영문 초록

Piezoelectric materials can directly convert mechanical energy to electrical one, and vice versa. Research on piezoelectric materials and devices has a long history, and now many relevant products are available in a wide range of applications such as medical, military, industrial, home appliance, and mobile electronics. One of the major research trends now is not only to further improve the physical properties of the piezoelectric materials, but also to reduce the size of the piezoelectric devices. This review focuses on the development of piezoelectric thin films that can enhance the performance of microtransducers.

목차

1. 서론

2. 본문

3. 결론 및 전망

참고문헌

키워드

p-MUT piezoelectric thin film MEMS transducer