탄소나노튜브의 합성수율 증대와 저온 합성에 미치는 기판 전처리의 영향

• 영문명: Effect of substrate pretreatment on the growth yield enhancement and growth temperature decrease of carbon nanotubes
• 발행기관: 강원대학교 산업기술연구소
• 저자명: 신의철(Eui-Chul Shin) 조성일(Sung-Il Jo) 정구환(Goo-Hwan Jeong)
• 간행물 정보: 『산업기술연구』vol.39, 7~14쪽, 전체 8쪽
• 주제분류: 공학 > 공학일반
• 파일형태: PDF
• 발행일자: 2019.10.30

영문 초록

Carbon nanotubes (CNT) on metal substrates are definitely beneficial because they can maintain robust mechanical stability and high conductivity between CNT and metal interfaces. Here, we report direct growth of CNT on Ni-based superalloy, Inconel 600, using thermal chemical vapor deposition (CVD) with acetylene feedstock in the growth temperature range of 400-725°C. Furthermore, we studied the effect of substrate pretreatment on the growth yield enhancement and growth temperature decrease of CNT on Inconel 600. Activation energy (AE) for CNT growth was estimated from the CNT height change with respect to the growth temperature. The AE values significantly decreased from 205.03 to 24.35 kJ/mol by the pretreatment of thermal oxidation of Inconel substrate at 725°C under ambient. Higher oxidation temperature tends to have lower activation energy. The results have shown the importance of pretreatment temperature on CNT growth yield and growth temperature decrease.

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4. 결 론

키워드

Carbon nanotubes Chemical vapor deposition Substrate pretreatment Growth yield enhancement Growth temperature reduction