CNT 습도센서의 플라즈마처리 효과와 선택성 특성

• 영문명: Plasma Process Effect and Selectivity Characteristics of Carbon Nanotube Film Humidity Sensor
• 발행기관: 강원대학교 산업기술연구소
• 저자명: 박찬원(Park, Chan-Won)
• 간행물 정보: 『산업기술연구』vol.33, 67~72쪽, 전체 6쪽
• 주제분류: 공학 > 공학일반
• 파일형태: PDF
• 발행일자: 2013.09.30

영문 초록

CNT(carbon nanotube) humidity sensors with plasma treated electrodes exhibit a much faster response time and a higher sensitivity to humidity, compared to untreated CNT and porous Cr electrodes. These results may be partially due to their percolated pore structure being more accessible for water molecules and for expending the diffusion of moisture to the polyimide sensing film, and partially due to the oxygenated surface of CNT films. This paper shows a plasma process effect and selectivity characteristics of CNT film humidity sensor.

목차

1. 서론

2. CNT 습도센서의 설계와 제작

3. 결과 및 고찰

4. 결론

키워드

카본나노튜브 플라즈마처리 습도센서 carbon nanotubes plasma process humidity sensor