반도체 웨이퍼 가공 공정 역학 조사에서 과거 노출 평가 방법 고찰

• 영문명: Retrospective Exposure Assessment of Wafer Fabrication Workers in the Semiconductor Industry
• 발행기관: 한국환경보건학회
• 저자명: 박동욱(Donguk Park)
• 간행물 정보: 『1. 한국환경보건학회지』제37권 제1호, 12~21쪽, 전체 10쪽
• 주제분류: 공학 > 환경공학
• 파일형태: PDF
• 발행일자: 2011.02.28

영문 초록

The objective of this study is to review retrospective exposure assessment methods used in wafer fabrication operations to determine whether adverse health effects including mortality or cancer incidence are related to employment in particular work activities and to recommend an appropriate approach for retrospective exposure assessment methods for epidemiological study. The goal of retrospective exposure assessment for such studies is to assign each study subject to a workgroup in such a way that differences in exposure within the workgroups are minimized, as well as to maximize the contrasts in exposure between workgroups. To reduce the misclassification of exposure and to determine if adverse health effects including mortality or cancer incidence are related to particular work activities of wafer fabrication workers, a minimum requirement of work history information on the wafer manufacturing eras, job and department at which they were exposed should be assessed. Retrospective assessment of the task that semiconductor workers performed should be conducted to determine not only the effect of a particular job on the development of adverse health effects including mortality or cancer incidence, but also to adjust for the healthy worker effect. In order to identify specific hazardous agents that may cause adverse health effects, past exposure to a specific agent or agent matrices should also be assessed.

키워드

semiconductor industry wafer fabrication silicon wafer retrospective assessment