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• 영문명: Selective laser bonding using liquid glass
• 발행기관: 한국레이저가공학회
• 저자명: 김주한(Joohan Kim) 이제훈(Jae-Hoon Lee) 김향태(Hyangtae Kim)
• 간행물 정보: 『한국레이저가공학회 학술대회 논문집』2008년도 춘계학술발표대회 논문집, 185~188쪽, 전체 4쪽
• 주제분류: 공학 > 기계공학
• 파일형태: PDF
• 발행일자: 2008.06.30

영문 초록

A selective laser micro bonding process using liquid glass (Methylsilsesquioxane) was developed and the results are analysed. The liquid glass can be solidified with Nd:YAG laser irradiation and it can be applied for joining two glass substrates. A bonding thickness of a few hundreds~a few micron can be achieved. The appropriate lase power density for this process is around 40~60 kW/㎠ and its bonding force is 1000~1200gf. This process can be applied for bonding micro devices such as micro bio-sensors or display products. Its advantages and limitations are presented and discussed.

키워드

methylsilsesquioxane Nd:YAG laser micro-joining