KSCN이 함유된 용액에서 레이저유도 에칭된 구리 마이크로 구조물의 특성

• 영문명: Characteristic of a Cu microstructure using laser-assisted etching in aqueous solution with KSCN
• 발행기관: 한국레이저가공학회
• 저자명: 오광환(Kwang H. Oh) 조석인(S. I. Cho) 정성호(S. H. Jeong)
• 간행물 정보: 『한국레이저가공학회 학술대회 논문집』2007년도 추계학술발표대회 논문집, 48~51쪽, 전체 4쪽
• 주제분류: 공학 > 기계공학
• 파일형태: PDF
• 발행일자: 2007.11.30

영문 초록

  A fabrication technique of copper microgrooves with triangular cross-sectional profile using the laser-assisted etching is introduced. To simplify the complex setup of a conventional objective lens-based laser micromachining, a novel optical fiber-based laser-assisted etching system is proposed to manufacture metallic microgrooves. In the new laser micromachining system, the optical fiber plays a key role as a light waveguide and machining tool. The mixture of H₂SO₄ and H₂O₂ included 0.1% KSCN is chosen as the optimal etchant for manufacturing copper microgroove without background etching in the non-irradiated area. The fabrication of copper microgroove with 100~300㎛ in depth and 100~150㎛ in width is achieved with the proposed machining technique. The grooves fabricated at the optimal process condition have smooth surface and clear edge. The angle of triangular groove is measured to be in the range of 30~50 degree and the aspect ratio of grooves is about 1~2. The overall etching characteristics are investigated with respect to process parameters in this paper.

목차

ABSTRACT
1. 서론
2. 본론
3. 결론
참고문헌

키워드

Laser micromachining Laser material processing Laser-assisted thermochemical wet etching Microgroove MicrostructureMicrodevice