전기적 프로그램이 가능한 퓨즈 - 응용, 프로그램 및 신뢰성

• 영문명: Electrically Programmable Fuse - Application, Program and Reliability
• 발행기관: 한국마이크로전자및패키징학회
• 간행물 정보: 『마이크로전자 및 패키징학회지』제19권 제3호, 21~30쪽, 전체 10쪽
• 주제분류: 공학 > 산업공학
• 파일형태: PDF
• 발행일자: 2012.09.30

영문 초록

Technology trend and application of laser fuse, anti-fuse, and eFUSE as well as the structure, programming mechanism, and reliability of eFUSE have been reviewed. In order to ensure eFUSE reliability in the field, a sensing circuit trip point consistent with the fuse resistance distribution, process variation, and device degradation in the circuit such as hot carrier or NBTI, as well as fuse resistance reliability must be considered to optimize and define a reliable fuse programming window.

목차

1. 서론

2. 이퓨즈 구조 및 프로그램

3. 신뢰성

4. 맺음말

감사의 글

참고문헌

키워드

eFUSE Electromigration Thermomigration Joule heating Reliability